high performance 300mm silicon photonics platform for r&d and product prototyping
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| Date | 2022 |
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| Auteurs | Szelag,- B | Garcia,- S | Adelmini,- L | Kazarmendes,- M | Guerber,- S | Congia,- S | Myko,- A | Grosse,- P | Virot,- L | Wilmart,- Q | |
| Source | 2022 IEEE Photonics Conference, IPC 2022 - Proceedings |
| Résumé | In this paper, we present the new 300mm silicon photonics platform of CEA-LETI. Advanced fabrication tools such as immersion lithography scanner lead to improved performances but also more uniform results compared to existing 200mm platforms. The paper described the technology and its modular integration scheme to address various application needs. Electro-optical characteristics of typical devices of the PDK library are presented. © 2022 IEEE. |
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